Photomask pellicle glue residue removal

ABSTRACT

Embodiments described herein generally relate to an apparatus and methods for removing a glue residue from a photomask. The glue residue may be exposed when a pellicle is removed from the photomask. Before a new pellicle can be adhered to the photomask, the glue residue may be removed. To remove the glue residue, a laser beam may be projected through a lens and focused on a surface of the glue residue. The glue residue may be ablated from the photomask by the laser beam.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims benefit of U.S. provisional patent applicationSer. No. 62/694,310, filed Jul. 5, 2018, the entirety of which is hereinincorporated by reference.

BACKGROUND Field

Embodiments disclosed herein generally relate to the field ofsemiconductor manufacturing equipment, and more specifically, apparatusand methods for removing a glue residue from a photomask.

Description of the Related Art

During photolithography, a photomask is used to transfer a pattern to aphotoresist disposed on a substrate. Particles that enter a focal planeof the photomask may damage the mask. The particles may also be imagedand transferred as part of the pattern which results in a defocused orsuboptimal exposure of the photomask. A pellicle is often disposed onthe photomask to prevent particles from damaging and contaminating thephotomask.

The pellicle is a thin transparent film that does not affect the patterngenerated by light passing through the photomask. Generally, thepellicle is glued to the photomask. Over time, deposited particles maybuild up on the pellicle. To remove the deposited particles, thepellicle is replaced. When a pellicle is removed from a photomask, aglue residue remains on the photomask. Before a new pellicle can beadhered to the photomask, the glue residue is removed.

Conventional techniques to remove the glue residue typically involveexposing the glue residue to a solvent to remove the glue residue fromthe photomask. However, the solvent can damage and contaminate thephotomask. Thermal energy may also be utilized to remove the glueresidue. However, the conventional thermal energy exposure undesirablyincreases a temperature of the photomask, often resulting in damage tothe photomask. If thermal energy is not used to remove the glue, removalof the glue residue is inefficient and time consuming. Thus,conventional techniques increase photolithography tool downtime in orderto remove the pellicle glue residue and clean the photomask.

Thus, an improved technique to remove glue residue from a photomask isneeded.

SUMMARY

In one embodiment, an adhesive removal method is provided. The methodincludes removing a pellicle from a photomask to expose a glue residue.The photomask is positioned so that the glue residue is in a path of alaser beam. The laser beam is focused on a surface of the glue residue.The glue residue is ablated with the laser beam to remove the glueresidue from the photomask.

In another embodiment, an adhesive removal method is provided. Themethod includes removing a pellicle from a photomask. The photomask ispositioned with a glue residue in a path of a laser beam. The method mayalso include projecting the laser beam through a lens positioned betweena laser source and the photomask. The laser beam is focused with thelens at a focal point on a surface of the glue residue. The method mayalso include sublimating the glue residue with the laser beam focusedthereon

In yet another embodiment, an apparatus for removing glue residue from aphotomask is provided. The apparatus includes a pulsed laser sourceconfigured to generate electromagnetic energy at a wavelength in a rangeof between about 100 nm and about 400 nm. A transparent window isdisposed in a propagation path of the electromagnetic energy. A sidewallenclosing a volume therein is disposed parallel to the propagation pathof the electromagnetic energy and adjacent to the transparent windowopposite the pulsed laser source. A lens is disposed within and normalto the propagation path of the electromagnetic energy and between thepulsed laser source and the transparent window. The lens is positionedto focus the electromagnetic energy at a focal point positioned along acentral axis of the volume and opposite the transparent window.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this disclosure and are therefore not to beconsidered limiting of its scope, for the disclosure may admit to otherequally effective embodiments.

FIG. 1 is a schematic cross-sectional view of an ablation apparatusaccording to an embodiment of the disclosure.

FIG. 2 illustrates operations of a method for removing a glue residuefrom a photomask according to an embodiment of the disclosure.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements disclosed in oneembodiment may be beneficially utilized on other embodiments withoutspecific recitation.

DETAILED DESCRIPTION

One or more embodiments disclosed herein may generally relate toapparatus and methods for removing a glue residue from a photomask usedfor extreme ultraviolet (EUV) lithography. However, it is contemplatedthat the embodiments described herein may be utilized for otherphotolithography processes which utilize a photomask and a pellicle.

A pellicle is adhered to a photomask to prevent particle deposition onand contamination of the photomask. After a period of time, a buildup ofparticles on the pellicle may interfere with the pattern of thephotomask being transferred to a photoresist. In that case, the pellicleis replaced. When a pellicle is removed from the photomask, a glueresidue from a glue used to adhere the pellicle to the photomask mayremain on the photomask. To ensure a new pellicle sufficiently adheresto the photomask, the glue residue is removed. The pellicle may also beremoved from the photomask for periodic maintenance or cleaning of thephotomask.

For a typical lithography process, the pellicle is adhered to thephotomask using acrylic glue. A solvent may be used to quickly remove anacrylic glue residue from the photomask. However, for an extremeultraviolet lithography process, an epoxy glue is generally used toadhere the pellicle to the photomask. Residue from the epoxy glue can beremoved from a photomask using a solvent, but the process is timeconsuming and exposing the photomask to the solvent for a period of timecan damage the photomask. For example, an acid-based solution used toremove the glue residue may etch and damage the photomask.

Accordingly, improved techniques for removing the glue residue aredescribed herein. Embodiments described herein provide techniques forremoving a glue residue from a photomask using laser energy. A lasersource is used to remove the glue residue from the photomask withoutincreasing a temperature of the glue residue. An increase in temperaturemay soften the glue residue which makes the glue more difficult toremove from the photomask.

To prevent an increase in temperature of the glue residue, anultraviolet (UV) wavelength laser is used. The UV wavelength laserbreaks chemical bonds of the glue residue without increasing atemperature thereof. Using a UV wavelength laser, the glue residue canbe removed from the photomask in a short period of time (e.g., less thanabout 1 minute).

UV radiation from the laser may damage the photomask underlying the glueresidue. A laser with a power of about 3 watts may damage the photomask.To prevent damage to the photomask, a low power laser of less than about1 watt is used in one embodiment.

As used herein, photomask may refer to either a unitary apparatus formedfrom transparent material or a thin film deposited on a transparentphotomask substrate. In some embodiments, the photomask substrateincludes a mixture of fused silica and titanium dioxide. In oneembodiment, a coating is disposed on a surface of the photomasksubstrate opposite the glue residue. In this embodiment, the coatingincludes a chromium nitride material. When removing the glue residue,the laser propagates through the photomask and the photomask substrateand damages the coating. To prevent damage to the coating, the low powerlaser may be used in combination with a high numerical aperture optic tofocus the laser on a surface of the glue residue. The optic alsodefocuses the laser as it propagates through the photomask to reduce theenergy density of the laser incident on a surface of the coating.

FIG. 1 is a schematic cross-sectional view of an ablation apparatus 100that may be used to practice various embodiments of this disclosure. Achamber body 150 and lid assembly 158 define a first volume 160. In oneembodiment, the chamber body 150 and the lid assembly 158 are fabricatedfrom a metallic material, for example, aluminum, stainless steel, andalloys thereof. In another embodiment, the chamber body 150 and the lidassembly 158 are fabricated from ultraviolet-proof plastic materials. Anablation apparatus 100 is disposed within the first volume 160. Apedestal 154 is also disposed within the first volume 160. In oneembodiment, the pedestal 154 is disposed in the first volume 160opposite the ablation apparatus 100. The pedestal 154 is configured tosupport a photomask 126 during processing.

The ablation apparatus 100 includes a second volume 110 at leastpartially defined by a transparent window 112 and a sidewall 122. Thetransparent window 112 is coupled to the sidewall 122 and the sidewall122 extends from the transparent window 112. In one embodiment, thesidewall 122 is fabricated from an opaque material. In anotherembodiment, the sidewall 122 is fabricated from a transparent material.Suitable materials for fabrication of the sidewall 122 include metallicmaterials, such as aluminum, stainless steel, or alloys thereof. Thesidewall 122 may also be fabricated from polymeric materials, such asplastic materials or the like.

A laser source 102 is disposed within the first volume 160. A powersource 152 is coupled to the laser source 102 to control electromagneticenergy emitted therefrom. The electromagnetic energy emitted from thelaser source 102 is in the form of a laser beam. The laser beam travelsinto the second volume 110 along a propagation path 104. In oneembodiment, the laser beam is coherent and collimated. In anotherembodiment, the laser beam is spatially and/or temporally decorrelatedto attenuate an energy density of the laser beam. In one embodiment, thelaser source 102 is a pulsed source and emits sequential laser pulses. Afrequency of the laser pulses is between about 30 and about 120 permillisecond, or between about 30 kHz and about 120 kHz. In oneembodiment, a duration of the pulsed laser is about 1 millisecond. Inother embodiments, the duration of the pulsed laser is, for example,about 1 nanosecond, about 1 picosecond, or about 1 femtosecond. Thus,the laser source 102 may be considered a millisecond pulsed laser, ananosecond pulsed laser, a picosecond pulsed laser, or a femtosecondpulsed laser. A wavelength of the electromagnetic energy emitted fromthe laser source 102 is within a range of between about 10 nm and about400 nm, such as between about 200 nm and about 375 nm, for example about355 nm.

The laser source 102 can be a low power source. In one embodiment, thelaser source 102 has a power less than about 1 watt. The laser beamemitted from the laser source 102 propagates along the propagation path104 and is incident on a surface 134 of a lens 106. In one embodiment,the surface 134 of the lens 106 is substantially flat. In anotherembodiment, the surface 134 of the lens 106 is concave or convex. Thelaser beam propagates through the lens 106 and exits a surface 136. Inone embodiment, the surface 136 is concave. In another embodiment, thesurface 136 is convex. While the lens 106 is illustrated as a singlelens, the lens 106 may include one or more lenses in series (e.g., acompound lens). In one embodiment, the lens 106 is fabricated from afused silica material. In another embodiment, the lens 106 is fabricatedfrom a quartz material.

The lens 106 can have a high numerical aperture with a short focallength. The focal length may be between about 30 mm and about 110 mm,such as between about 50 mm and 100 mm, for example, about 56 mm. Thefocal length of the lens 106 may be measured between the surface 136 ofthe lens 106 and a focal point 138. The laser beam emitted from thelaser source 102 is focused by the lens 106 to form a focused beam 108.The focal point 138 of the focused beam 108 is positioned at a surface132 of a glue residue 130 to be removed from a photomask 126.

The photomask 126 may be disposed on and supported by the pedestal 154.The pedestal 154 is configured to rotate about a central axis duringcleaning of the photomask 126. Alternatively or in addition, thepedestal 154 may be configured to move in the X and Y directions toposition the glue residue 130 in the path of the focused beam 108. Inone embodiment, the pedestal 154 is configured to move in the Zdirection to increase or decrease a space 124 between the sidewall 122and the photomask 126. Moving the pedestal 154 in the Z direction alsoenables changing of the focal point 138 of the focused beam 108 relativeto the surface 132 of the glue residue 130. Accordingly, if the glueresidue 130 has a non-uniform thickness, the pedestal 154 may be movedin the Z direction to more finely align the focal point 138 on thesurface 132 to improve ablation of the glue residue 130.

A power source 156 is coupled to the pedestal 154 to control movement ofthe pedestal 154 relative to the ablation apparatus 100. The powersource 156 may be a mechanical actuator, an electrical actuator, or apneumatic actuator or the like which is configured to either rotate thepedestal 154 about the central axis and/or move the pedestal 154 in anyof the X, Y, and Z directions. In one embodiment, the power source 156is a stepper motor. In one embodiment, the ablation apparatus 100 isstationary within the first volume 160 while the pedestal 154 isconfigured to move such that the surface 132 of the glue residue 130 ispositioned at the focal point 138. Alternatively, the ablation apparatus100 may be movably disposed with the first volume 160 while the pedestal154 remains stationary.

In one embodiment, the glue residue 130 is an epoxy material. The lens106 focuses the laser beam such that the energy of the laser beam isfocused at the focal point 138 and de-focused after the laser beampropagates through the glue residue 130. As such, an energy density ofthe laser beam is concentrated at the focal point 138 and the energydensity of the laser beam is reduced as the laser beam propagatesthrough the glue residue 130 and the photomask 126.

In one embodiment, the energy density of the focused beam 108 at thefocal point 138 is greater than the energy density of the focused beam108 at a coating 140 disposed on a surface 142 of the photomask 126opposite the glue residue 130. That is, the laser beam is focused at thefocal point 138 and is defocused at the surface 142 where the coating140 is adhered to the photomask 126. The laser beam is defocused at thesurface 142 to substantially reduce or prevent modification of thecoating 140 at a location where the laser beam is incident on thesurface 142 and the coating 140.

Upon exiting the surface 136 of the lens 106, the focused beam 108travels to a first surface 114 of the transparent window 112. In oneembodiment, the transparent window 112 is fabricated from a fused silicamaterial. In another embodiment, the transparent window 112 isfabricated from a quartz material. In one embodiment, the transparentwindow 112 has a thickness of between about 1 mm and about 5 mm, such asabout 3 mm.

The transparent window 112 does not substantially alter the propagationpath of the focused beam 108 propagating therethrough. Thus, the focusedbeam 108 propagates through the transparent window 112 from the firstsurface 114 to a second surface 116 of the transparent window 112without substantial modification or aberration being introduced into thefocused beam 108.

The second volume 110 is configured to confine particles of the glueresidue 130 that are removed from the photomask 126 during laserablation of the glue residue 130. For example, ablation of the glueresidue 130 may cause particles of the glue residue 130 to break apartfrom the photomask 126 and travel into the second volume 110. Evacuatingthe particles of the glue residue 130 from the second volume 110 mayprevent re-deposition of the particles onto the surface 128 of thephotomask 126.

In one embodiment, an exhaust port 118 is formed through the sidewall122. The exhaust port 118 extends through the chamber body 150. Theexhaust port 118 is fluidly connected to an exhaust pump 120 and enablesfluid communication between the second volume 110 and the exhaust pump120. The exhaust pump 120 generates a fluid flow path from the secondvolume 110 to the exhaust pump 120 by reducing a pressure in the secondvolume 110 to evacuate particles from the second volume 110. That is, apressure in the volume 110 may be slightly less than an atmosphericpressure external to the second volume 110.

The sidewall 122 is spaced apart from the photomask 126 having the glueresidue 130 thereon. A space 124 between the sidewall 122 and thephotomask 126 enables a fluid to flow between the sidewall 122 and thephotomask 126 and into the exhaust port 118. The fluid flow from thespace 124 to the exhaust port 118 facilitates glue particle removal fromthe second volume 110 and prevents re-deposition of particles on thephotomask 126. Together, the sidewall 122, exhaust port 118, andtransparent window 112 form a fume extraction hood that evacuatesparticles from the second volume 110.

FIG. 2 illustrates operations of a method 200 for removing a glueresidue from a photomask, according to one embodiment. As shown, themethod 200 begins at operation 202 where a pellicle is removed from aphotomask 126. Removal of the pellicle from the photomask 126 exposes aglue residue 130 on a surface 128 of the photomask 126.

At operation 204, the glue residue 130 is positioned in a propagationpath 104 of a laser beam. A laser source 102 emits the laser beam whichpropagates through a focusing lens 106 disposed between the laser source102 and the photomask 126.

At operation 206, the laser beam is focused by the lens 106 to a focalpoint 138 on a surface 132 of the glue residue 130 on the photomask 126.Focusing the laser at the focal point 138 provides an energy density ofthe laser at the focal point 138 greater than an energy density of thelaser at a surface 142 of the photomask 126 opposite the glue residue130.

At operation 208, the glue residue 130 is ablated by the laser beam toremove the glue residue 130 from the photomask 126. The glue residue 130is ablated without increasing a temperature of the photomask 126. Asdiscussed above, a temperature of the glue residue 130 remainssubstantially constant to prevent softening of the glue residue 130.Thus, when the glue residue 130 is ablated, particles of the glueresidue 130 are removed from the photomask 126.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosed subjectmatter may be devised without departing from the basic scope thereof,and the scope thereof is determined by the claims that follow.

The invention claimed is:
 1. An apparatus for cleaning glue residue froma photomask, the apparatus comprising: a chamber body defining a firstvolume therein; a pedestal disposed within the first volume and capableof supporting the photomask; and an ablation apparatus within the firstvolume, the ablation apparatus comprising: a sidewall surrounding asecond volume; a laser source configured to emit a laser beam throughthe second volume for ablating a glue residue from the photomask,wherein the laser source comprises: a pulsed laser source configured togenerate electromagnetic energy of the laser beam at a wavelength in arange of between about 100 nm and about 400 nm: a transparent windowdisposed in a propagation path of the electromagnetic energy; and a lensdisposed within and normal to the propagation path of theelectromagnetic energy and between the pulsed laser source and thetransparent window, the lens positioned to focus the electromagneticenergy at a focal point, the focal point positioned along a central axisof the second volume and opposite the transparent window.
 2. Theapparatus of claim 1, wherein a power of the pulsed laser source is lessthan about 1 watt.
 3. The apparatus of claim 1, wherein a frequency ofthe pulsed laser source is between about 30 kHz and about 120 kHz. 4.The apparatus of claim 1, further comprising: an exhaust port formedthrough the sidewall of the ablation apparatus.
 5. The apparatus ofclaim 1, wherein the lens comprises a compound lens.
 6. An apparatus forcleaning glue residue from a photomask, the apparatus comprising: achamber body defining a first volume therein; a pedestal disposed withinthe first volume and capable of supporting the photomask; and anablation apparatus within the first volume, the ablation apparatuscomprising: a sidewall surrounding a second volume; a laser sourceconfigured to emit a laser beam through the second volume for ablating aglue residue from the photomask; a transparent window disposed in apropagation path of the laser beam; and a lens disposed within andnormal to the propagation path of the laser beam and between the lasersource and the transparent window.
 7. The apparatus of claim 6, whereinthe lens is positioned to focus the laser beam at a focal pointpositioned along a central axis of the second volume and opposite thetransparent window.
 8. The apparatus of claim 6, wherein the sidewallextends from the transparent window opposite the lens.
 9. The apparatusof claim 8, wherein the second volume is at least partially defined bythe transparent window and the sidewall.
 10. The apparatus of claim 9,wherein the laser source is a pulsed laser source.
 11. The apparatus ofclaim 10, wherein a frequency of the pulsed laser source is betweenabout 30 kHz and about 120 kHz.
 12. The apparatus of claim 10, whereinthe lens comprises a compound lens.
 13. The apparatus of claim 10,wherein a power of the pulsed laser source is less than about 1 watt.14. An apparatus for cleaning glue residue from a photomask, theapparatus comprising: a chamber body defining a first volume therein; apedestal disposed within the first volume and capable of supporting thephotomask; and an ablation apparatus within the first volume, theablation apparatus comprising: a laser source; a transparent windowdisposed in a propagation path of a laser beam emitted from the lasersource; a lens disposed between the laser source and the transparentwindow, the lens positioned within and normal to the propagation path ofthe laser beam; and a sidewall surrounding a second volume between thelens and the pedestal, the sidewall extending from the transparentwindow opposite the laser source.
 15. The apparatus of claim 14, whereinthe lens is positioned to focus the laser beam at a focal pointpositioned along a central axis of the second volume and opposite thetransparent window.
 16. The apparatus of claim 14, wherein the lasersource is a pulsed laser source having a frequency of between about 30kHz and about 120 kHz.
 17. The apparatus of claim 14, wherein the lenscomprises a compound lens.
 18. The apparatus of claim 14, furthercomprising: an exhaust port formed through the sidewall of the ablationapparatus.
 19. The apparatus of claim 14, wherein a power of the lasersource is less than about 1 watt.
 20. The apparatus of claim 1, furthercomprising a lid assembly that further defines the first volume.